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Accessories

Fiducial positioning camera
30x/60x power magnifying camera
Position adjustment can easily be done by magnifying the substrate surface accurately.

Vacuum Table
A substrate will be hold on the table surface by the vacuum force. There are two types of Vacuum tables: One is Popular model "VT-ABS" made of the plastic resin. The other is Precision model "VTP-CRM" made of the ceramics and suitable for a material as thin as 50µm.

Surface Detecting Function
Automatically detect the Z-axis position when the tip of the blade touches the surface of the substrate.

Tool Protrusion Equipment
You can measure the protrusion length of the tool from the pressure foot by the micro meter.

Ring setter
You can adjust the protrution length of the drilling bit from the bottom of the spindle motor.

Microscope with LED
Upright image
100 times magnification of a substrate surface with the clear illumination of LED
Anti-vibration mat
The prominent surface absorb the vibration

Super cleaner Jetstream


 


MITS General Catalog

English
(PDF file / 1.8MB)



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