MITS Nanometric Sensor

Typical uses (1)

Measuring displacement and vibration of hard disks and spindle motors

Besides steadily higher densities, IT devices in recent years are increasingly being used in harsh environments such as the outdoors or motor vehicles. Hard disks with today's huge storage capacities need to be resistant to vibration if they are to operate normally in such environments.

The following nanometric sensor was developed by MITS to meet these stringent demands:

Nanometric Sensor 212HS
(For high sensitivity, wide temperature range)

Probe		611L-1 (example)
Outer dimension		Ø16mm
Measuring electrode		Rectangular, 0.37 x 2 mm
Measuring range		100±50µm
Sensitivity		200mv/µm
Accuracy		±1%F.S
Resolution p-p	5KHz	30nm
	2KHz	15nm
	200Hz	5nm

Ideal for measuring RRO, NRRO, and flying height of precision spindle motors under temperature conditions in range of -30 to 100°C.

Associated Data: 100°C measured waveforms and data

Typical uses (2)

Measuring thermal displacement of metal and precision positioning of control stages

Since all types of manufacturing equipment are requiring higher accuracy as nanotechnology progresses, measuring thermal displacement in the metal parts that make up this equipment is becoming increasingly important.

To meet these needs, MITS has developed the following easy-to-use products capable of low-drift, multi-channel measurements.

Nanometric Sensor Model 212
(For high stability, multi-channel support)

Probe		614A-1 (example)
Outer dimension		Ø16mm
Measuring electrode		Ø1.8mm
Measuring range		100±50µm
Sensitivity		200mv/µm
Accuracy		±0.2%F.S
Resolution p-p	2KHz	15nm
	200Hz	5nm
	20Hz	1nm

This model is convenient for taking measurements with low drift and multiple (8 or more) channels. It is ideal for precision positioning equipment, such as control stages, piezo drive tables, and edge detection.

Measurements up to a maximum accuracy of 10 nm are possible.

Model 212 (for high stability, multi-channel support) is also available as 2 separate types :


Model 212LD (High-stability type)	Model 212U (High-stability, multi-channel type)

Associated Data: Long-term drift data

Typical uses (3)

Measuring displacement and vibration of hard disks and super-precision rotating shafts at Ultra high resolution.

Nanometric Sensor Model 211

Probe		613A-1 (example)
Outer dimension		Ø16mm
Measuring electrode		Ø1.2mm
Measuring range		100±25µm
Sensitivity		400mv/µm
Accuracy		±1%F.S
Resolution p-p	20KHz	3nm
	2KHz	1nm
	200Hz	0.5nm

Ideal for measuring RRO and NRRO of precision spindle motors.

Options :

- Velocity and acceleration measurements
- Higher response frequencies (up to 500 kHz)
Please contact MITS for details.

Associated Data

Prototyping Printed Board Making Systems	Board Makers	Tools	Software
Multi-layer Board Making Systems	Formation of the through-hole	Non-contact Capacitive Displacement Meters	Link