What
is a Nanometric Sensor?
A nanometric sensor measures extremely small movements (displacement)
of physical objects without touching the target object. A probe is placed
close to the object and measures its displacement by detecting changes
in electrostatic capacity. Displacement measuring instruments use a variety
of methods, such as laser or eddy. However, the greatest feature of the
capacitive method is its superior capability to measure displacement as
minute as 1 nanometer (10-9 m), a sensitivity that is over
10 times greater than other methods.
To make such small measurements possible, in addition to
the main unit, MITS has developed and now manufactures special probes.
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Features
- Ultra-high resolution : 1 nm p-p*
- High sensitivity, high accuracy, high linearity
- High-frequency response : 20 kHz standard, up to 500 kHz (optional)
- Suitable for low- and high-temperature environments : -30
to 100°C (Model 212 high-sensitivity type)
- High stability (temperature drift) : 0.01%
F.S/°C
(Model 212 high-stability type)
- Can be used in vacuum chamber : Model 212 probe
- Probes of various shapes can be manufactured
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*Resolution of 1
nm p-p is approximately 0.15 nm rms; 6.7 nm p-p is approximately 1 nm
rms.
Applications
| Measurement of rotating shafts, axial
and radial runout |
Spindle motors, mini motors, all types
of drums, air spindle motors, polygon mirrors in high temperature |
| Vibration measurements |
Ultrasonic vibration devices, piezoelectric
devices, piezo devices, musical instrument, mechanical vibration,
traffic vibration |
| Positioning |
All types of control stages, edge detection |
| Other measurements |
Thickness, metal cylinders (inner diameter,
outer dimensions, circularity), moisture content |
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Examples of Use, Features, Other Information for Each Model
| Typical
uses (1) |
Model 212
(High sensitivity, suitable for wide temperature range) |
Measures displacement
and vibration of hard disks and spindle motors |
| Typical
uses (2) |
Model 212
(High stability, multi-channel support) |
Measures thermal displacement
of metal, precision positioning of control stages |
| Typical
uses (3) |
Model 211
(High speed, Ultra high resolution) |
Measures displacement
and vibration of hard disks and spindle motors. Particularly suited
for measurements in high frequency range. |
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Example of nanometric sensor applications and measurements
More detailed examples of applications and
measurements can be seen below.
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Model 212 
